劉解華，張其善，楊軍

（北京航空航天大學(xué)電子信息工程學(xué)院，北京 100083）

摘要：在介紹π網(wǎng)絡(luò)法石英晶體元件電氣參數(shù)測(cè)量原理的基礎(chǔ)上，設(shè)計(jì)了測(cè)量系統(tǒng)，并對(duì)π網(wǎng)絡(luò)輸出電壓以及π網(wǎng)絡(luò)兩端電壓之間相位差進(jìn)行分析與建模，提出迭代法和對(duì)分法相結(jié)合的快速測(cè)量算法。此結(jié)合算法測(cè)量速度快、測(cè)試精度高，適合1～200MHz頻段石英晶體元件半成品加工控制和成品測(cè)量，且通過實(shí)驗(yàn)證明整個(gè)測(cè)量系統(tǒng)的測(cè)量精度和穩(wěn)定性都達(dá)到國際先進(jìn)水平。

關(guān)鍵詞：π網(wǎng)絡(luò)；石英晶體；迭代法；對(duì)分法

中圖分類號(hào)：TP206+.1 文獻(xiàn)標(biāo)識(shí)碼：A 文章編號(hào)：1672-4984(2006)02-0058-04

Research on fast measurement technique of quartz crystal unit resonant frequency

LIU Jie-hua, ZHANG Qi-shan, YANG Jun

(School of Electronic and Information Engineering, Beijing University of Aeronautics and Astronautics,Beijng 100083,China)

Abstract: A quartz crystal units’measurement system based on π network measuring method is introduced. A model is built on the output voltage of π network and the phase delay between its input voltage and output voltage after adequate research on them. A algorithm combining iterative algorithm and bisection algorithm is put forward. Because of its fast speed and high precision, it is used for semi-manufactured product’s manufacturing control and finished product’s measurement of quartz crystal units ranging from 1MHz to 200MHz. It was proved that measurement precision and stability of the whole measurement system has reached an international leading level.

Key words:π network；Quartz crystal component；Iterative algorithm；Bisection algorithm