摘  要：渦流柵傳感器基于橫向電渦流效應設計，其反射導體參數變化對傳感器測量準確度的影響比較明顯，因此需要對反射導體尺寸、形狀參數進行分析和優化，使其能夠適應更多高準確度的測量場合。利用有限元分析方法（Maxwell軟件）建立渦流柵傳感器的線圈、反射導體模型，對不同尺寸、形狀參數的反射導體進行仿真計算，分析反射導體長度、寬度、形狀變化對渦流柵傳感器的影響。分析結果表明：為提高傳感器的準確度，反射導體選用略大于線圈長度和盡可能大寬度的兩邊半圓導體，為傳感器選擇合理的反射導體參數提供有利參考。
關鍵詞：Maxwell軟件；渦流柵傳感器優化；有限元；反射導體
文獻標志碼：A       文章編號：1674-5124（2016）01-0126-04
Simulation analysis of nonlinear error effects of conductor parameters on
eddy current sensors
LI Kun， TAO Wei， ZHAO Hui， YANG Jingjing， CAI Yunze
（Department of Instrument Science and Engineering，Shanghai Jiaotong University，Shanghai 200240，China）
Abstract: Because of lateral eddy current effect， eddy current sensors， if the conductor parameters are changed， will be greatly influenced in terms of measurement precision. Therefore， the size and shape and other parameters of the conductor needs to be analyzed and optimized， so that the sensor can be tuned for more high-precision measurement occasions. Coil and conductor models were created with finite elements analysis（FEA） to emulate and calculate different sizes and shapes of conductors and analyze how the sensor was influenced by the changes in conductor length， width and shape. The analytical results have demonstrated that the measurement precision of the sensor can be enhanced if the conductor is semicircular on both sides， slightly longer than its coil and as wide as possible. The study has provided a good way of choosing rational conductor parameters to improve the measurement precision of eddy current sensors.
Keywords: Maxwell software； eddy current sensor； FEA； conductor